Product overview
Hexamethyldisilazane (HMDS) is a moisture-sensitive organosilicon reagent used as a photoresist adhesion promoter, wafer-surface treatment agent and silylation reagent. Electronic use requires a validated high-purity grade with controlled water, metals, particles and nonvolatile residue.
Function & Usage
- Promote Adhesion to Fillers & Substrates
Improves interfacial bonding or compatibility between organic resins and inorganic fillers, glass, minerals or metal substrates. Typical uses: Photoresist adhesion promotion, Silicon-wafer dehydration and surface priming, Silylation in specialty synthesis.
Product information
- Primary category:
- Electronics & Electrical Materials, Fine Chemicals
- Subcategory:
- Electronic Process Chemicals & Surface-Treatment Agents
- CAS No.:
- 999-97-3
- Form:
- Clear colorless moisture-sensitive liquid
- Content / Grade:
- Industrial, reagent and electronic grades; assay ≥99.0%, ≥99.5% or ≥99.9%; water, metals, particles and residue by grade
- Applications:
- Photoresist adhesion promotion, Silicon-wafer dehydration and surface priming, Silylation in specialty synthesis, Analytical derivatization and chromatography
- Hazard / Transport:
- Highly flammable, moisture-reactive and corrosive; harmful or toxic exposure classifications may apply. Commercial transport is commonly assigned UN 2924, Class 3 with subsidiary Class 8; confirm the exact shipping description and packing group from the supplied SDS. Any UN number, hazard class or packing group applies only when confirmed for the quoted concentration and physical form in the current grade-specific SDS.
- Storage:
- Store tightly sealed under dry inert gas in a cool, dry and well-ventilated flammable-liquid area. Exclude moisture and keep away from acids, oxidizers, heat, sparks and open flames.